Vibration isolation device
Vibration isolation device
From vibration control consulting to the sale of standard products and the design and manufacturing of custom products.
- Company：明立精機
- Price：Unset
Vibration Isolation Unit Product List and Ranking from 4 Manufacturers, Suppliers and Companies
Vibration Isolation Unit Product List
1～11 item / All 11 items
Displayed results
6-degree-of-freedom active vibration isolation system
If you choose based on vibration isolation performance and stability, the air pressure controlled active vibration isolation system.
The MAPS series active vibration isolation system from Meiritsu Seiki is a unit type that incorporates pneumatic actuators for vertical and horizontal use within a compact design. By using four units, it demonstrates excellent vibration isolation, damping, and positioning performance against all degrees of freedom of vibration. −− Features −− ● Supports all degrees of freedom of vibration even in a compact size ● Capable of isolating vibrations from equipment over 10 tons with standard MAPS ● Does not shake even when mounted with operating devices such as stages ● Cuts vibrations in frequency ranges that are difficult to manage with passive isolation ● MAPS excels in positioning accuracy and leveling precision
- Company：明立精機
- Price：Other
Active Vibration Isolation System "ME Series"
Control in 3D (6 degrees of freedom)! It has vibration isolation performance that is not affected by the mounted object.
The "ME Series" is a vibration control system that continuously monitors the vibrations of the mounted board and controls them by applying counter-phase forces using built-in actuators. The gain adjustment, which is essential for active control, is automatically optimized by Meiritsu Seiki's original control system. By re-evaluating the device structure, we have made it possible to use lightweight mounted objects, such as small SPMs, without compromising vibration isolation performance. 【Features】 ■ 6 degrees of freedom active control ■ Control in three dimensions (6 degrees of freedom) ■ Automatic active adjustment & automatic leveling ■ Vibration isolation performance unaffected by the mounted object ■ Honeycomb optical table compatible (optional) *For more details, please refer to the PDF materials or feel free to contact us.
- Company：明立精機
- Price：Other
Linear Active Vibration Isolation Unit "VAAV-S" EMC Countermeasure Type
It is effective in microscopes that dislike low-frequency vibrations that cannot be eliminated by passive vibration isolation tables. It can be used with just a small compressor and power supply.
The Linear Active Vibration Isolation Unit "VAAV-S" uses a unique active vibration isolation algorithm for high-speed calculations, and with a non-air-based ultra-fast response linear actuator and ultra-sensitive velocity sensors, it instantly cancels out vibrations. Since it only uses air springs for load support, it can provide world-class vibration isolation performance through floor feed-forward control using ultra-sensitive velocity sensors that can be deployed on the floor side with just a small compressor and power supply. 【Features】 ○ Excellent responsiveness ○ Low air source requirement ○ High cost performance For more details, please contact us or download the catalog.
- Company：昭和サイエンス
- Price：Other
Active Vibration Isolation Unit "VAAV-H"
Achieving slim design with the same performance as conventional products! Pneumatic active vibration isolation unit.
The active vibration isolation unit "VAAV-H" is equipped with a dedicated ultra-sensitive acceleration sensor for VAAV. It accurately detects extremely small vibrations. Using a unique active vibration isolation algorithm for high-speed computation, it instantly cancels out vibrations with a high-precision, high-output actuator. Additionally, ultra-sensitive acceleration sensors are generously deployed on the floor side, achieving world-class vibration isolation performance through feedforward control. 【Features】 ○ Maintains the same performance as the VAAV-A series while keeping the overall height of the device low. ○ High-precision control of displacement and position in all directions is possible through pneumatic control. ○ Selection of high-flow valves with fast response capable of handling large moving loads is available. ○ Safe and secure design compliant with CE marking (Controller SAC-07). ○ Standard features include stage feedforward functionality and vibration waveform display analysis software. For more details, please contact us or download the catalog.
- Company：昭和サイエンス
- Price：Other
Technical Document: "What is Vibration Isolation... Overview of Passive Vibration Isolation Tables"
This document introduces the types of vibration isolation tables and their main components, as well as examples of vibration isolation table configurations and characteristics.
= Content = 1. Vibration isolation effect of the vibration isolation table 2. Shock response of the vibration isolation table 3. Types and performance of vibration isolation materials 3-1 Comparison of characteristics by type of vibration isolation material 3-2 Air spring (bellows type) 3-3 Air spring (diaphragm type) 3-4 Coil spring type 3-5 Vibration isolation rubber type 4. Automatic level adjuster 5. Measurement of vibration isolation effect For more details, please contact us or download the catalog.
- Company：昭和サイエンス
- Price：Other
![[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment](https://image.mono.ipros.com/public/product/image/875/2000687223/IPROS20629238516810340635.png?w=280&h=280)
[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment
Measures taken with the air servo active vibration isolation system! A good vibration environment has been established across all frequency ranges.
We would like to introduce a case study on active vibration isolation measures for liquid crystal substrate inspection equipment. During the installation of a large liquid crystal substrate inspection device (length measuring machine), a preliminary survey of the vibration environment of the installation floor revealed that it exceeded the allowable limits. This length measuring machine observes the line width of patterns optically and is sensitive to vibration environments, so we implemented measures using an air servo active vibration isolation device. After the active vibration isolation measures were taken, we cleared the vibration allowable limits for the device and were able to establish a good vibration environment across all frequency ranges. [Case Overview] ■ Issue: A preliminary survey of the vibration environment of the installation floor for the large liquid crystal substrate inspection device (length measuring machine) revealed that it exceeded the allowable limits. ■ Measures: Installation of an air servo active vibration isolation device. ■ Effect: Cleared the vibration allowable limits for the device and established a good vibration environment across all frequency ranges. *For more details, please refer to the PDF document or feel free to contact us.
- Company：特許機器
- Price：Other
Vibration Isolation Device - Tabletop Air Spring Vibration Isolation Device AVT Series
It is a vibration isolation device that can be easily handled like accessories for precision instruments.
All the functions of a large high-performance vibration isolation device are condensed into a compact size. Sixteen models are available to best fit the characteristics of precision equipment and vibration isolation needs. You can easily create a high-performance vibration isolation space with the feel of an accessory for precision equipment. A compact special air spring system with enhanced performance has been adopted. Vibration isolation devices can be used in small spaces.
- Company：明立精機
- Price：Other
Vibration Isolation Device Desk-Type Air Spring Vibration Isolation Device ADZ-A Series
A new model that integrates cost performance, vibration isolation performance, and operability at a high level.
The ADZ series, with a wealth of delivery achievements, inherits the design philosophy that flows through it and adds new solutions to each of our customers' requests in a fully remodeled version. It features further improvements in vibration isolation performance, significantly enhanced work comfort, the addition of larger mounting plate sizes, and a rich array of options that improve the operability of mounted equipment. Together, these elements have realized a high cost-performance vibration isolation device that is suitable for various types of mounted equipment and usage locations.
- Company：明立精機
- Price：Other
Vibration Isolation Device Air Spring Type Vibration Isolation Device AP Series
An optimal vibration isolation system tailored to the characteristics of precision instruments can be constructed at a low cost.
Air Spring Vibration Isolation Device AP Series In vibration isolation devices, excellent performance is essential, but flexibility is also highly valued. This is because it has become increasingly common to directly integrate the best vibration isolation system tailored to the characteristics of precision equipment. The AP series is a vibration isolation system that can respond to such needs. In addition to ample functionality, it also offers sufficient expandability. This vibration isolation system achieves a more ideal vibration environment.
- Company：明立精機
- Price：Other
Vibration Isolation Device "Vibration Isolation Palette"
The damping is large with a viscous damper, so the effects of resonance are less likely to occur! A simple structure vibration isolation device.
The "Vibration Isolation (Damping) Palette" is a simple structure vibration isolation device that integrates a spring mechanism using coil springs and a damping mechanism using a viscous damper. By incorporating coil springs into the viscous material, the damping effect is enhanced. Additionally, rubber guides suppress impacts during collisions with the stopper, and the rubber bellows control horizontal movement. 【Features】 ■ Simple structure that integrates the damping mechanism ■ Enhanced damping effect by incorporating coil springs into the viscous material ■ Control of horizontal movement through rubber bellows ■ Reduced susceptibility to resonance effects ■ Significant reduction of vibrations during transport *For more details, please refer to the PDF document or feel free to contact us.
- Company：エーエス
- Price：Other
